Chemically amplified photoresists have become the mainstream of the market, and the market demand for photoacid generators (PAGs) continues to rise.
With the continuous advancement of modern photolithography technology, after KrF, ArF and other photoresists have been widely used, UV photoresists based on chemical amplification technology have become the mainstream of semiconductor photoresists, and market demand continues to rise. Photoacid generator (PAG) is the main component of chemical amplification glue. During the exposure process, PAG can…
