Electronic grade disilane (Si2H6) industry standards continue to improve, and there is huge room for domestic substitution in the Chinese market
Electronic grade disilane (Si2H6) is a special electronic gas. It usually uses monosilane as raw material and is produced through processes such as glow discharge, cooling recovery, and low-temperature distillation. Electronic grade disilane has a high silicon content and has the advantages of low deposition temperature and fast deposition speed. It is widely used in…
