Electronic grade silane gas has good application prospects, and the domestic market is gradually realizing domestic substitution.
Electronic grade silane gas is a special electronic gas, which is mainly produced by reaction and purification of silicon powder, hydrogen, silicon tetrachloride, catalysts, etc. Among them, silane with a purity above 6N becomes electronic grade silane gas. Electronic grade silane gas is an irreplaceable special gas, mainly used in the production of granular single…
