The PECVD nanofilm industry has broad development prospects and the global market presents an oligopoly competition pattern.

Nanofilm refers to a film composed of particles (crystals) with a size of nanometers or a film with a layer thickness of nanometers. According to different production methods, nanofilms can be divided into atmospheric pressure chemical vapor deposition (APCVD), low pressure chemical vapor deposition (LPCVD), plasma enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD)…